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Square YSZ (100) substrate
YSZ (100) 10x10 x0.1 mm Extra Thin Substrate, 2SP
- Single crystal YSZ Substrate
- Size
- 10 x 10 x 0.10 mm +/-0.005 mm Standard, and optional 1.0 mm available
- Orientation
- (100) +/-0.5 Deg
- Polish
- polished by CMP technology . Two sides polished
- Surface roughness
- < 5 A by AFM
- Packing
- The substrate is packed in 100 grade clean plastic bag under 1000 class clean room
- Typical Physical Properties
- Chemical Formula
- Y2O3 stabilized ZrO2, 8 %mole Y2O3
- Crystal Structure
- Cubic, Face Centered, CaF2 type
- Thermal Expansion Coeff
- 10.3 ppm / oC
- Crystal Growth Technique
- Flux Technique
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